Inventor
RENKEN WAYNE GLENN
US7 patents
⚠️ This page may combine multiple inventors who share the name “RENKEN WAYNE GLENN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SENSARRAY CORP
6 patentsUS7151366B2Dec 19, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP54 citations95
US7135852B2Nov 14, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP79 citations95
US6325536B1Dec 4, 2001
Integrated wafer temperature sensors
SENSARRAY CORP108 citations95
US5967661AOct 19, 1999
Temperature calibration substrate
SENSARRAY CORP75 citations93
US7149643B2Dec 12, 2006
Integrated process condition sensing wafer and data analysis system
SENSARRAY CORP15 citations91
US7156924B2Jan 2, 2007
System and method for heating and cooling wafer at accelerated rates
SENSARRAY CORP13 citations82