Inventor

DELP DEANA R

US3 patents

Patents

3 patents

US7154256B2Dec 26, 2006

Integrated VI probe

TOKYO ELECTRON LTD9 citations71

US7158845B2Jan 2, 2007

Man-machine interface for monitoring and controlling a process

TOKYO ELECTRON LTD7 citations70

US7115211B2Oct 3, 2006

Endpoint detection using laser interferometry

TOKYO ELECTRON LTD2 citations56