Inventor
DESILVA ANUJA
US3 patents
Patents
3 patentsUS9929012B1Mar 27, 2018
Resist having tuned interface hardmask layer for EUV exposure
IBM20 citations91
US10141188B2Nov 27, 2018
Resist having tuned interface hardmask layer for EUV exposure
IBM0 citations49
US10134592B2Nov 20, 2018
Resist having tuned interface hardmask layer for EUV exposure
IBM0 citations49