Inventor
Friddle Phil
US3 patents
Patents
3 patentsUS9972502B2May 15, 2018
Systems and methods for performing in-situ deposition of sidewall image transfer spacers
LAM RES CORP2 citations69
US10037890B2Jul 31, 2018
Method for selectively etching with reduced aspect ratio dependence
LAM RES CORP3 citations68
US10541141B2Jan 21, 2020
Method for selectively etching with reduced aspect ratio dependence
LAM RES CORP0 citations48