Inventor
ANSARI NAVEED
US3 patents
Patents
3 patentsUS9972502B2May 15, 2018
Systems and methods for performing in-situ deposition of sidewall image transfer spacers
LAM RES CORP2 citations69
US10658174B2May 19, 2020
Atomic layer deposition and etch for reducing roughness
LAM RES CORP3 citations68
US11170997B2Nov 9, 2021
Atomic layer deposition and etch for reducing roughness
LAM RES CORP0 citations57