Inventor
GOSS MICHAEL
US11 patents
⚠️ This page may combine multiple inventors who share the name “GOSS MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS6670278B2Dec 30, 2003
Method of plasma etching of silicon carbide
LAM RES CORP54 citations94
US6841483B2Jan 11, 2005
Unique process chemistry for etching organic low-k materials
LAM RES CORP19 citations89
US9972502B2May 15, 2018
Systems and methods for performing in-situ deposition of sidewall image transfer spacers
LAM RES CORP2 citations69
US10037890B2Jul 31, 2018
Method for selectively etching with reduced aspect ratio dependence
LAM RES CORP3 citations68
US12237175B2Feb 25, 2025
Polymerization protective liner for reactive ion etch in patterning
LAM RES CORP0 citations58
US7476610B2Jan 13, 2009
Removable spacer
LAM RES CORP1 citations50
US10541141B2Jan 21, 2020
Method for selectively etching with reduced aspect ratio dependence
LAM RES CORP0 citations48
US10002773B2Jun 19, 2018
Method for selectively etching silicon oxide with respect to an organic mask
LAM RES CORP0 citations39