Inventor
RYU CHANG-GIL
KR6 patents
Patents
6 patentsUS10029332B2Jul 24, 2018
Spot heater and device for cleaning wafer using the same
SAMSUNG ELECTRONICS CO LTD6 citations83
US10576582B2Mar 3, 2020
Spot heater and device for cleaning wafer using the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US9999957B2Jun 19, 2018
Polishing head and polishing carrier apparatus having the same
SAMSUNG ELECTRONICS CO LTD3 citations65
US11648644B2May 16, 2023
Polishing pad conditioning apparatus
SAMSUNG ELECTRONICS CO LTD0 citations55
US8033401B2Oct 11, 2011
Wafer guide for preventing wafer breakage in semiconductor cleaning apparatus
SAMSUNG ELECTRONICS CO LTD5 citations55
US10340158B2Jul 2, 2019
Substrate cleaning apparatus
SAMSUNG ELECTRONICS CO LTD0 citations37