Inventor
OSHIDA YOSHIYUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OSHIDA YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
9 patentsUS10491202B2Nov 26, 2019
RF generator
HITACHI INT ELECTRIC INC2 citations69
US12175569B2Dec 24, 2024
Terminal device and RF power supply device
HITACHI INT ELECTRIC INC1 citations60
US10812036B2Oct 20, 2020
Matching box and matching method
HITACHI INT ELECTRIC INC1 citations59
US11901159B2Feb 13, 2024
RF generator device and substrate processing apparatus
HITACHI INT ELECTRIC INC0 citations58
US10896810B2Jan 19, 2021
RF generating apparatus and plasma treatment apparatus
HITACHI INT ELECTRIC INC0 citations50
US11810759B2Nov 7, 2023
RF generator
HITACHI INT ELECTRIC INC0 citations47
US9876482B2Jan 23, 2018
Matching unit and matching method
HITACHI INT ELECTRIC INC0 citations40
US10840874B2Nov 17, 2020
Matching device
HITACHI INT ELECTRIC INC0 citations39
US10291198B2May 14, 2019
Matching device and matching method
HITACHI INT ELECTRIC INC0 citations39