Inventor
WOSKOV PAUL
US9 patents
⚠️ This page may combine multiple inventors who share the name “WOSKOV PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
4 patentsUS6362449B1Mar 26, 2002
Very high power microwave-induced plasma
MASSACHUSETTS INST TECHNOLOGY183 citations98
US5909277AJun 1, 1999
Microwave plasma element sensor
MASSACHUSETTS INST TECHNOLOGY25 citations92
US6198293B1Mar 6, 2001
Method and apparatus for thickness measurement using microwaves
MASSACHUSETTS INST TECHNOLOGY48 citations91
US7453566B2Nov 18, 2008
Hybrid plasma element monitor
MASSACHUSETTS INST TECHNOLOGY5 citations62