Inventor
WU CHUNG-HSUAN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “WU CHUNG-HSUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
2 patentsUS11821847B2Nov 21, 2023
Wafer backside defect detection method and wafer backside defect detection apparatus
UNITED MICROELECTRONICS CORP0 citations52
US11644427B2May 9, 2023
Automatic detection method and automatic detection system for detecting crack on wafer edges
UNITED MICROELECTRONICS CORP0 citations49