Inventor
TAYA SHUNROKU
JP23 patents
⚠️ This page may combine multiple inventors who share the name “TAYA SHUNROKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
18 patentsUS6310341B1Oct 30, 2001
Projecting type charged particle microscope and projecting type substrate inspection system
HITACHI LTD108 citations98
US6794648B2Sep 21, 2004
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
HITACHI LTD19 citations92
US6703613B2Mar 9, 2004
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
HITACHI LTD28 citations92
US6150657ANov 21, 2000
Energy filter and electron microscope equipped with the energy filter
HITACHI LTD34 citations92
US7928376B2Apr 19, 2011
Element mapping unit, scanning transmission electron microscope, and element mapping method
HITACHI LTD15 citations83
US4870283ASep 26, 1989
Electric multipole lens
HITACHI LTD19 citations82
US4703180AOct 27, 1987
Microwave discharge type ion source for ion injection devices
HITACHI LTD20 citations82
US4476393AOct 9, 1984
Ion implantation apparatus
HITACHI LTD20 citations75
US6933501B2Aug 23, 2005
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
HITACHI LTD10 citations74
US6066852AMay 23, 2000
Electron energy filter
HITACHI LTD11 citations74
US5585630ADec 17, 1996
Electron energy filter and transmission electron microscope provided with the same
HITACHI LTD10 citations74
US5291016AMar 1, 1994
Electrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the same
HITACHI LTD16 citations74
US4839523AJun 13, 1989
Ion implantation apparatus for semiconductor manufacture
HITACHI LTD8 citations72
US4599516AJul 8, 1986
Specimens rotating device
HITACHI LTD16 citations72
US4972083ANov 20, 1990
Post-acceleration detector for mass spectrometer
HITACHI LTD9 citations70
US4634931AJan 6, 1987
Ion implanter
HITACHI LTD16 citations67
US4947041AAug 7, 1990
Analyzer tube for mass spectrometry
HITACHI LTD3 citations63
US4629930ADec 16, 1986
Plasma ion source
HITACHI LTD4 citations60
HITACHI HIGH TECH CORP
5 patentsUS7022983B2Apr 4, 2006
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP15 citations93
US7250601B2Jul 31, 2007
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
HITACHI HIGH TECH CORP15 citations92
US7067805B2Jun 27, 2006
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
HITACHI HIGH TECH CORP17 citations89
US7315024B2Jan 1, 2008
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP5 citations74
US7838827B2Nov 23, 2010
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP4 citations63