Inventor

IM KYUNG TAEK

KR2 patents

Patents

2 patents

US12578649B2Mar 17, 2026

Bake unit, operation method thereof, and photo spinner equipment having the bake unit

SEMES CO LTD0 citations52

US12469741B2Nov 11, 2025

Apparatus for processing substrate

SEMES CO LTD0 citations44