Inventor
ORGAMI NOBUTOSHI
JP3 patents
Patents
3 patentsUS5430271AJul 4, 1995
Method of heat treating a substrate with standby and treatment time periods
DAINIPPON SCREEN MFG80 citations94
US4838979AJun 13, 1989
Apparatus for processing substrate surface
DAINIPPON SCREEN MFG70 citations94
US5289263AFeb 22, 1994
Apparatus for exposing periphery of an object
DAINIPPON SCREEN MFG33 citations91