Inventor · disambiguated record
Itaru Kanai
Also filed as: KANAI ITARU
1 granted patent·1 pending application·23 citations·filing 1994–2008
42Inventor score
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2 records- 0150US5554489AMethod of forming a fine resist pattern using an alkaline film covered photoresistMITSUBISHI ELECTRIC CORP·Filed 1994·Granted Sep 10, 1996·23 cites·13 claims
- 0243US2009039519A1Semiconductor device, photomask, semiconductor device production method, and pattern layout methodPOWERCHIP SEMICONDUCTOR CORP·Filed 2008·Application pending·0 cites
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