Inventor
CHOE HYUN-CHEOL
KR5 patents
Patents
5 patentsUS6121110ASep 19, 2000
Trench isolation method for semiconductor device
SAMSUNG ELECTRONICS CO LTD40 citations92
US6071802AJun 6, 2000
Method for manufacturing semiconductor device having self-aligned contact
SAMSUNG ELECTRONICS CO LTD28 citations91
US6316803B1Nov 13, 2001
Integrated circuit memory devices having self-aligned contact
SAMSUNG ELECTRONICS CO LTD12 citations72
US5583357ADec 10, 1996
Semiconductor device and a method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD8 citations70
US5639682AJun 17, 1997
Method of forming a semiconductor device using a self-aligned contact
SAMSUNG ELECTRONICS CO LTD3 citations59