Inventor
ISHIHAMA YOSHIYASU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHAMA YOSHIYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JAPAN PIONICS
6 patentsUS6666921B2Dec 23, 2003
Chemical vapor deposition apparatus and chemical vapor deposition method
JAPAN PIONICS23 citations91
US6155540ADec 5, 2000
Apparatus for vaporizing and supplying a material
JAPAN PIONICS36 citations91
US6106898AAug 22, 2000
Process for preparing nitride film
JAPAN PIONICS27 citations91
US6461407B2Oct 8, 2002
Method and apparatus for supplying liquid raw material
JAPAN PIONICS10 citations72
US6100415AAug 8, 2000
Purified alkoxide and process for purifying crude alkoxide
JAPAN PIONICS10 citations72
US6592674B2Jul 15, 2003
Chemical vapor deposition apparatus and chemical vapor deposition method
JAPAN PIONICS11 citations70