Inventor
BURDORF JAMES E
US3 patents
Patents
3 patentsUS6120952ASep 19, 2000
Methods of reducing proximity effects in lithographic processes
MICRON TECHNOLOGY INC155 citations97
US6319644B2Nov 20, 2001
Methods of reducing proximity effects in lithographic processes
MICRON TECHNOLOGY INC29 citations91
US6284419B2Sep 4, 2001
Methods of reducing proximity effects in lithographic processes
MICRON TECHNOLOGY INC29 citations91