P

Inventor

MARKUNAS ROBERT J

US12 patents
⚠️ This page may combine multiple inventors who share the name “MARKUNAS ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RES TRIANGLE INST

6 patents
US6552295B2Apr 22, 2003

Plasma furnace disposal of hazardous wastes

RES TRIANGLE INST61 citations92
US5418018AMay 23, 1995

Chemical vapor deposition of diamond films using water-based plasma discharges

RES TRIANGLE INST26 citations90
US6558504B1May 6, 2003

Plasma processing system and method

RES TRIANGLE INST13 citations81
US7112536B2Sep 26, 2006

Plasma processing system and method

RES TRIANGLE INST7 citations71
US5168330ADec 1, 1992

Semiconductor device having a semiconductor substrate interfaced to a dissimilar material by means of a single crystal pseudomorphic interlayer

RES TRIANGLE INST11 citations71
US5480686AJan 2, 1996

Process and apparatus for chemical vapor deposition of diamond films using water-based plasma discharges

RES TRIANGLE INST8 citations68

RES TRIANGLE INST INC

2 patents
US5180435AJan 19, 1993

Remote plasma enhanced CVD method and apparatus for growing an epitaxial semiconductor layer

RES TRIANGLE INST INC611 citations97
US4870030ASep 26, 1989

Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer

RES TRIANGLE INST INC90 citations94

MARTIN MARIETTA ENERGY SYSTEMS

1 patent
US5521360AMay 28, 1996

Apparatus and method for microwave processing of materials

MARTIN MARIETTA ENERGY SYSTEMS243 citations98

RESERACH TRIANGLE INST INC

1 patent
US5018479AMay 28, 1991

Remote plasma enhanced CVD method and apparatus for growing an epitaxial semconductor layer

RESERACH TRIANGLE INST INC73 citations92

SHARP KK

1 patent
US5908565AJun 1, 1999

Line plasma vapor phase deposition apparatus and method

SHARP KK19 citations89

SHARP KABUSHIKI

1 patent
US5585292ADec 17, 1996

Method of fabricating a thin film transistor

SHARP KABUSHIKI9 citations73