Inventor
UM HYEON-ILL
KR3 patents
Patents
3 patentsUS7208878B2Apr 24, 2007
Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode
SAMSUNG ELECTRONICS CO LTD13 citations82
US7119489B2Oct 10, 2006
Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode
SAMSUNG ELECTRONICS CO LTD12 citations82
US6723215B2Apr 20, 2004
Sputtering apparatus for forming a metal film using a magnetic field
SAMSUNG ELECTRONICS CO LTD3 citations61