Inventor
CECCHI JOSEPH L
US11 patents
⚠️ This page may combine multiple inventors who share the name “CECCHI JOSEPH L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CONSORTIUM FOR SURFACE PROCESS
2 patentsUS5111111AMay 5, 1992
Method and apparatus for coupling a microwave source in an electron cyclotron resonance system
CONSORTIUM FOR SURFACE PROCESS92 citations93
US5302803AApr 12, 1994
Apparatus and method for uniform microwave plasma processing using TE1101 modes
CONSORTIUM FOR SURFACE PROCESS47 citations91