Inventor

ASA FUMINORI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “ASA FUMINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

2 patents

US6712579B2Mar 30, 2004

Substrate transfer apparatus and substrate transfer method

DAINIPPON SCREEN MFG23 citations89

US7596425B2Sep 29, 2009

Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and method

DAINIPPON SCREEN MFG14 citations79

ASA FUMINORI

1 patent

US8540473B2Sep 24, 2013

Load port

ASA FUMINORI2 citations54

SUZUKI KENSUKE

1 patent

US8423173B2Apr 16, 2013

Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatus

SUZUKI KENSUKE3 citations53