Inventor
GOHIRA TAKU
JP15 patents
Patents
15 patentsUS10410877B2Sep 10, 2019
Etching method
TOKYO ELECTRON LTD40 citations92
US11804379B2Oct 31, 2023
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US10714370B2Jul 14, 2020
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD3 citations68
US12272526B2Apr 8, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US11404281B2Aug 2, 2022
Method of etching silicon containing films selectively against each other
TOKYO ELECTRON LTD0 citations60
US10903084B2Jan 26, 2021
Method of etching silicon containing films selectively against each other
TOKYO ELECTRON LTD0 citations60
US12080521B2Sep 3, 2024
Plasma processing method
TOKYO ELECTRON LTD0 citations59
US11749508B2Sep 5, 2023
Plasma processing method
TOKYO ELECTRON LTD0 citations59
US11342167B2May 24, 2022
Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus
TOKYO ELECTRON LTD0 citations59
US11251049B2Feb 15, 2022
Etching method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US10304691B2May 28, 2019
Method of etching silicon oxide and silicon nitride selectively against each other
TOKYO ELECTRON LTD0 citations50
US11631590B2Apr 18, 2023
Substrate processing method, substrate processing apparatus and cleaning apparatus
TOKYO ELECTRON LTD0 citations48
US10811275B2Oct 20, 2020
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD0 citations48
US10714320B2Jul 14, 2020
Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus
TOKYO ELECTRON LTD0 citations48
US10361070B2Jul 23, 2019
Method of processing target object
TOKYO ELECTRON LTD0 citations38