Inventor

YEH MING-CHIH

TW3 patents

⚠️ This page may combine multiple inventors who share the name “YEH MING-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

2 patents

US9752057B2Sep 5, 2017

CMP method for suppression of titanium nitride and titanium/titanium nitride removal

CABOT MICROELECTRONICS CORP3 citations66

US9803109B2Oct 31, 2017

CMP composition for silicon nitride removal

CABOT MICROELECTRONICS CORP2 citations64

CMC MAT LLC

1 patent

US12338369B2Jun 24, 2025

Nitride inhibitors for high selectivity of TiN—SiN CMP applications

CMC MAT LLC0 citations36