Inventor
NATSUHARA MASUHIRO
JP53 patents
Patents
50 patentsUS7090394B2Aug 15, 2006
Temperature gauge and ceramic susceptor in which it is utilized
SUMITOMO ELECTRIC INDUSTRIES478 citations99
US6508884B2Jan 21, 2003
Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES48 citations96
US6392197B2May 21, 2002
Ceramic heater for toner-fixing units and method for manufacturing the heater
SUMITOMO ELECTRIC INDUSTRIES21 citations93
US5732318AMar 24, 1998
Heater and heating/fixing unit comprising the same
SUMITOMO ELECTRIC INDUSTRIES35 citations93
US6664515B2Dec 16, 2003
Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern
SUMITOMO ELECTRIC INDUSTRIES38 citations92
US6423400B1Jul 23, 2002
Susceptor for semiconductor manufacturing equipment and process for producing the same
SUMITOMO ELECTRIC INDUSTRIES29 citations92
US6271163B1Aug 7, 2001
Aluminum nitride sintered body and method of preparing the same
SUMITOMO ELECTRIC INDUSTRIES22 citations92
US5602720AFeb 11, 1997
Mounting structure for semiconductor device having low thermal resistance
SUMITOMO ELECTRIC INDUSTRIES42 citations92
US7576303B2Aug 18, 2009
Wafer holder, and wafer prober provided therewith
SUMITOMO ELECTRIC INDUSTRIES11 citations84
US7554059B2Jun 30, 2009
Heater unit and semiconductor manufacturing apparatus including the same
SUMITOMO ELECTRIC INDUSTRIES10 citations84
US7425838B2Sep 16, 2008
Body for keeping a wafer and wafer prober using the same
SUMITOMO ELECTRIC INDUSTRIES10 citations84
US7361230B2Apr 22, 2008
Substrate processing apparatus
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US7211153B2May 1, 2007
Ceramic joined body, substrate holding structure and substrate processing apparatus
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US7177536B2Feb 13, 2007
Fluid heating heater
SUMITOMO ELECTRIC INDUSTRIES10 citations84
US7045045B2May 16, 2006
Workpiece holder for processing apparatus, and processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES14 citations84
US6384378B2May 7, 2002
Ceramic heater for toner-fixing units and method for manufacturing the heater
SUMITOMO ELECTRIC INDUSTRIES18 citations84
US6174614B1Jan 16, 2001
Sintered aluminum nitride body and metallized substrate prepared therefrom
SUMITOMO ELECTRIC INDUSTRIES17 citations84
US6716304B2Apr 6, 2004
Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder
SUMITOMO ELECTRIC INDUSTRIES8 citations74
US6671489B2Dec 30, 2003
Thermal fixing apparatus
SUMITOMO ELECTRIC INDUSTRIES10 citations74
US6458444B1Oct 1, 2002
Ceramic substrate and polishing method thereof
SUMITOMO ELECTRIC INDUSTRIES9 citations74
US6428741B2Aug 6, 2002
Aluminum nitride sintered body and method of preparing the same
SUMITOMO ELECTRIC INDUSTRIES5 citations74
US6084221AJul 4, 2000
Aluminum nitride heater
SUMITOMO ELECTRIC INDUSTRIES14 citations74
US6049064AApr 11, 2000
Heat fixing device for fixing a toner image
SUMITOMO ELECTRIC INDUSTRIES12 citations74
US7279048B2Oct 9, 2007
Semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES8 citations73
US5955148ASep 21, 1999
Aluminium nitride ceramics and method for preparing the same
SUMITOMO ELECTRIC INDUSTRIES11 citations73
US5677052AOct 14, 1997
Aluminum nitride ceramics and method for preparing the same
SUMITOMO ELECTRIC INDUSTRIES10 citations73
US6548787B2Apr 15, 2003
Ceramic heater
SUMITOMO ELECTRIC INDUSTRIES11 citations70
US6294275B1Sep 25, 2001
Aluminum-nitride sintered body, method for fabricating the same, and semiconductor substrate comprising the same
SUMITOMO ELECTRIC INDUSTRIES10 citations70
US7999210B2Aug 16, 2011
Heating device for manufacturing semiconductor
SUMITOMO ELECTRIC INDUSTRIES2 citations63
US7837798B2Nov 23, 2010
Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support
SUMITOMO ELECTRIC INDUSTRIES2 citations63
US7806984B2Oct 5, 2010
Semiconductor or liquid crystal producing device
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US7414823B2Aug 19, 2008
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed
SUMITOMO ELECTRIC INDUSTRIES6 citations63
US7394043B2Jul 1, 2008
Ceramic susceptor
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US7341969B2Mar 11, 2008
Aluminum nitride sintered body
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US7268321B2Sep 11, 2007
Wafer holder and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US7090423B2Aug 15, 2006
Connecting structures
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US6946625B2Sep 20, 2005
Ceramic susceptor
SUMITOMO ELECTRIC INDUSTRIES4 citations63
US6881128B1Apr 19, 2005
Ceramics base plate and method for producing the same
SUMITOMO ELECTRIC INDUSTRIES2 citations63
US6806443B2Oct 19, 2004
Ceramic susceptor
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US6770379B2Aug 3, 2004
Susceptor for semiconductor manufacturing equipment and process for producing the same
SUMITOMO ELECTRIC INDUSTRIES5 citations63
US6500052B2Dec 31, 2002
Method of polishing a ceramic substrate
SUMITOMO ELECTRIC INDUSTRIES3 citations63
US6078027AJun 20, 2000
Ceramic fixing heater containing silicon nitride
SUMITOMO ELECTRIC INDUSTRIES5 citations63
US7855569B2Dec 21, 2010
Wafer holder for wafer prober and wafer prober equipped with the same
SUMITOMO ELECTRIC INDUSTRIES6 citations62
US7495460B2Feb 24, 2009
Body for keeping a wafer, heater unit and wafer prober
SUMITOMO ELECTRIC INDUSTRIES2 citations62
US6696103B1Feb 24, 2004
Aluminium nitride ceramics and method for preparing the same
SUMITOMO ELECTRIC INDUSTRIES4 citations62
US6653604B2Nov 25, 2003
Heater member for mounting heating object and substrate processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES3 citations62
US12033880B2Jul 9, 2024
Wafer holding body
SUMITOMO ELECTRIC INDUSTRIES0 citations60
US10886157B2Jan 5, 2021
Wafer holding unit
SUMITOMO ELECTRIC INDUSTRIES1 citations60
US7408131B2Aug 5, 2008
Wafer holder and semiconductor manufacturing apparatus
SUMITOMO ELECTRIC INDUSTRIES0 citations52
US7264699B2Sep 4, 2007
Workpiece holder for processing apparatus, and processing apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES1 citations52
Showing the top 50 of 53 patents by PatentIndex Score.