P

Inventor

LIDDLE JAMES ALEXANDER

US7 patents
⚠️ This page may combine multiple inventors who share the name “LIDDLE JAMES ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUCENT TECHNOLOGIES INC

4 patents
US5701014ADec 23, 1997

Projection lithography apparatus

LUCENT TECHNOLOGIES INC27 citations88
US6177218B1Jan 23, 2001

Lithographic process for device fabrication using electron beam imaging

LUCENT TECHNOLOGIES INC28 citations85
US6051346AApr 18, 2000

Process for fabricating a lithographic mask

LUCENT TECHNOLOGIES INC17 citations82
US5985493ANov 16, 1999

Membrane mask for projection lithography

LUCENT TECHNOLOGIES INC6 citations60

AGERE SYSTEMS INC

2 patents
US6232040B1May 15, 2001

Method of electron beam exposure utilizing emitter with conductive mesh grid

AGERE SYSTEMS INC13 citations71
US6492647B1Dec 10, 2002

Electron guns for lithography tools

AGERE SYSTEMS INC4 citations60

AGERE SYST GUARDIAN CORP

1 patent
US6400090B2Jun 4, 2002

Electron emitters for lithography tools

AGERE SYST GUARDIAN CORP14 citations82