Inventor
WATSON GEORGE PATRICK
US7 patents
⚠️ This page may combine multiple inventors who share the name “WATSON GEORGE PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
4 patentsUS6218057B1Apr 17, 2001
Lithographic process having sub-wavelength resolution
LUCENT TECHNOLOGIES INC20 citations91
US5736281AApr 7, 1998
Dose modification proximity effect compensation (PEC) technique for electron beam lithography
LUCENT TECHNOLOGIES INC30 citations90
US5701014ADec 23, 1997
Projection lithography apparatus
LUCENT TECHNOLOGIES INC27 citations88
US6015644AJan 18, 2000
Process for device fabrication using a variable transmission aperture
LUCENT TECHNOLOGIES INC16 citations76