Inventor
BERGER MICHAEL GOETZ
DE4 patents
Patents
4 patentsUS5874047AFeb 23, 1999
Chemical sensors, in particular silicon-based biosensors
FORSCHUNGSZENTRUM JUELICH GMBH73 citations92
US5696629ADec 9, 1997
Optical component comprising layers of porous silicon
FORSCHUNGSZENTRUM JUELICH GMBH41 citations89
US5831329ANov 3, 1998
Layered system with an electrically activatable layer
FORSCHUNGSZENTRUM JUELICH GMBH8 citations70
US5935410AAug 10, 1999
Process and device for the lighting-supported structuring of porous silicon
FORSCHUNGSZENTRUM JUELICH GMBH5 citations57