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Inventor
HISATOMI TAKEHIRO
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “HISATOMI TAKEHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO SITIX CORP
1 patent
US5931662A
Aug 3, 1999
Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto
SUMITOMO SITIX CORP
43 citations
93
SUMITOMO METAL IND
1 patent
US6074479A
Jun 13, 2000
Silicon single crystal wafer annealing method and equipment, and silicon single crystal wafer and manufacturing method related thereto
SUMITOMO METAL IND
24 citations
90