Inventor
HAYATA SHIGERU
JP24 patents
⚠️ This page may combine multiple inventors who share the name “HAYATA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINKAWA KK
19 patentsUS6467673B2Oct 22, 2002
Bonding apparatus and bonding method
SHINKAWA KK27 citations92
US6464126B2Oct 15, 2002
Bonding apparatus and bonding method
SHINKAWA KK32 citations92
US6311391B1Nov 6, 2001
Flip-chip bonding apparatus
SHINKAWA KK45 citations89
US7886956B2Feb 15, 2011
Bonding apparatus and bonding stage height adjustment method for the bonding apparatus
SHINKAWA KK7 citations84
US6762848B2Jul 13, 2004
Offset measurement method, tool position detection method and bonding apparatus
SHINKAWA KK13 citations83
US10118246B2Nov 6, 2018
Mounting apparatus
SHINKAWA KK9 citations76
US6945446B2Sep 20, 2005
Wire bonding method and apparatus
SHINKAWA KK10 citations73
US6381359B1Apr 30, 2002
Bonding apparatus
SHINKAWA KK7 citations73
US10262968B2Apr 16, 2019
Wire bonding apparatus and wire bonding method
SHINKAWA KK2 citations72
US10586781B2Mar 10, 2020
Bonding apparatus and method of estimating position of landing point of bonding tool
SHINKAWA KK3 citations69
US6814121B2Nov 9, 2004
Bonding apparatus
SHINKAWA KK4 citations62
US6683731B2Jan 27, 2004
Bonding apparatus
SHINKAWA KK2 citations62
US6657799B2Dec 2, 2003
Wire bonding apparatus
SHINKAWA KK6 citations62
US12374650B2Jul 29, 2025
Manufacturing apparatus and manufacturing method of semiconductor device
SHINKAWA KK0 citations52
US12261148B2Mar 25, 2025
Wire bonding apparatus
SHINKAWA KK0 citations52
US12057427B2Aug 6, 2024
Wire bonding apparatus
SHINKAWA KK0 citations52
US7848022B2Dec 7, 2010
Imaging device and method for a bonding apparatus
SHINKAWA KK1 citations52
US11367703B2Jun 21, 2022
Bonding apparatus
SHINKAWA KK0 citations45
US10816322B2Oct 27, 2020
Bonding apparatus and method for detecting height of bonding target
SHINKAWA KK0 citations40
CANON KK
5 patentsUS5726740AMar 10, 1998
Projection exposure apparatus having illumination device with ring-like or spot-like light source
CANON KK48 citations96
US5345292ASep 6, 1994
Illumination device for projection exposure apparatus
CANON KK98 citations96
US5726739AMar 10, 1998
Projection exposure apparatus and device manufacturing method using the same
CANON KK48 citations92
US5367404ANov 22, 1994
Image projection method and semiconductor device manufacturing method using the same
CANON KK27 citations92
US6055039AApr 25, 2000
Illumination system and exposure apparatus using the same
CANON KK7 citations73