Inventor

BEACH ROBERT A

US4 patents

⚠️ This page may combine multiple inventors who share the name “BEACH ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CALIFORNIA INST OF TECHN

2 patents

US6579068B2Jun 17, 2003

Method of manufacture of a suspended nitride membrane and a microperistaltic pump using the same

CALIFORNIA INST OF TECHN72 citations93

US7189358B2Mar 13, 2007

Integrated micropump analysis chip and method of making the same

CALIFORNIA INST OF TECHN17 citations81

CALIFORNIA INSTITUE OF TECHNOL

1 patent

US6647796B2Nov 18, 2003

Semiconductor nitride pressure microsensor and method of making and using the same

CALIFORNIA INSTITUE OF TECHNOL44 citations89

US NAT AERONAUTICS AND SPACE A

1 patent

US7592747B1Sep 22, 2009

Piezoelectrically enhanced photocathode

US NAT AERONAUTICS AND SPACE A4 citations56