Inventor
MAHOROWALA ARPAN PRAVIN
US11 patents
⚠️ This page may combine multiple inventors who share the name “MAHOROWALA ARPAN PRAVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS11784047B2Oct 10, 2023
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP10 citations86
US10566194B2Feb 18, 2020
Selective deposition of etch-stop layer for enhanced patterning
LAM RES CORP5 citations82
US12051589B2Jul 30, 2024
Tin oxide thin film spacers in semiconductor device manufacturing
LAM RES CORP6 citations75
US11094542B2Aug 17, 2021
Selective deposition of etch-stop layer for enhanced patterning
LAM RES CORP2 citations71
US11869770B2Jan 9, 2024
Selective deposition of etch-stop layer for enhanced patterning
LAM RES CORP0 citations60
US12372872B2Jul 29, 2025
Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation
LAM RES CORP0 citations59
IBM
5 patentsUS6316167B1Nov 13, 2001
Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof
IBM189 citations98
US6514667B2Feb 4, 2003
Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof
IBM108 citations97
US6730445B2May 4, 2004
Attenuated embedded phase shift photomask blanks
IBM8 citations72
US6682860B2Jan 27, 2004
Attenuated embedded phase shift photomask blanks
IBM7 citations72
US6979518B2Dec 27, 2005
Attenuated embedded phase shift photomask blanks
IBM0 citations51