Inventor
KEETON TONY J
US6 patents
Patents
6 patentsUS6776849B2Aug 17, 2004
Wafer holder with peripheral lift ring
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Wafer holder with stiffening rib
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Wafer holder with peripheral lift ring
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Gridded susceptor
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Localized heating of substrates using optics
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Method of loading a wafer onto a wafer holder to reduce thermal shock
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