Inventor
NAKAMURA TOORU
JP16 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA TOORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS4636929AJan 13, 1987
Abnormal state detecting circuit of inverter
MITSUBISHI ELECTRIC CORP10 citations72
US4783622ANov 8, 1988
Frequency abnormality detecting circuit
MITSUBISHI ELECTRIC CORP7 citations70
US4667116AMay 19, 1987
Inverter control circuit
MITSUBISHI ELECTRIC CORP7 citations70
US4678949AJul 7, 1987
Synchronism detector circuit
MITSUBISHI ELECTRIC CORP1 citations49
TOKYO ELECTRON LTD
3 patentsUS10593571B2Mar 17, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations68
US11139181B2Oct 5, 2021
Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport block
TOKYO ELECTRON LTD4 citations66
US9558972B2Jan 31, 2017
Liquid treatment apparatus including return path and switching mechanism
TOKYO ELECTRON LTD0 citations41