Inventor
MCCARTHY ANTHONY M
US11 patents
Patents
11 patentsUS5395481AMar 7, 1995
Method for forming silicon on a glass substrate
UNIV CALIFORNIA185 citations98
US5674758AOct 7, 1997
Silicon on insulator achieved using electrochemical etching
UNIV CALIFORNIA73 citations95
US5414276AMay 9, 1995
Transistors using crystalline silicon devices on glass
UNIV CALIFORNIA56 citations95
US5760443AJun 2, 1998
Silicon on insulator with active buried regions
UNIV CALIFORNIA21 citations92
US5663078ASep 2, 1997
Method for fabricating transistors using crystalline silicon devices on glass
UNIV CALIFORNIA25 citations92
US5488012AJan 30, 1996
Silicon on insulator with active buried regions
UNIV CALIFORNIA34 citations92
US5399231AMar 21, 1995
Method of forming crystalline silicon devices on glass
UNIV CALIFORNIA46 citations92
US6649977B1Nov 18, 2003
Silicon on insulator self-aligned transistors
UNIV CALIFORNIA7 citations73
US6139716AOct 31, 2000
Submicron patterned metal hole etching
UNIV CALIFORNIA15 citations70
US6051493AApr 18, 2000
Process for protecting bonded components from plating shorts
UNIV CALIFORNIA3 citations60
US6346461B1Feb 12, 2002
Electroless epitaxial etching for semiconductor applications
UNIV CALIFORNIA1 citations51