Inventor
GOH LOH NAH LUONA
SG3 patents
Patents
3 patentsUS6513374B2Feb 4, 2003
Apparatus to quantify the adhesion of film
CHARTERED SEMICONDUCTOR MFG9 citations69
US7144828B2Dec 5, 2006
He treatment to improve low-k adhesion property
CHARTERED SEMICONDUCTOR MFG2 citations60
US7332422B2Feb 19, 2008
Method for CuO reduction by using two step nitrogen oxygen and reducing plasma treatment
CHARTERED SEMICONDUCTOR MFG1 citations50