Inventor

SCHLUETER JAMES

US4 patents

⚠️ This page may combine multiple inventors who share the name “SCHLUETER JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CORP

1 patent

US5872633AFeb 16, 1999

Methods and apparatus for detecting removal of thin film layers during planarization

SPEEDFAM CORP390 citations98

SPEEDFAM IPEC CORP

1 patent

US5989104ANov 23, 1999

Workpiece carrier with monopiece pressure plate and low gimbal point

SPEEDFAM IPEC CORP54 citations94

DEMA ENGINEERING COMPANY

1 patent

US7331488B2Feb 19, 2008

Multi-chemical dispensing system

DEMA ENGINEERING COMPANY39 citations89

SPEEDFAM IPEC

1 patent

US6095900AAug 1, 2000

Method for manufacturing a workpiece carrier backing pad and pressure plate for polishing semiconductor wafers

SPEEDFAM IPEC35 citations89