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Inventor
FREDERIC JUDITH C
US
2 patents
Patents
2 patents
US6204085B1
Mar 20, 2001
Reduced deformation of micromechanical devices through thermal stabilization
TEXAS INSTRUMENTS INC
77 citations
92
US7502155B2
Mar 10, 2009
Antireflective coating for semiconductor devices and method for the same
TEXAS INSTRUMENTS INC
0 citations
43