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Inventor
MUELLER DETLEV
DE
3 patents
⚠️ This page may combine multiple inventors who share the name “MUELLER DETLEV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCHUSTER KARL-HEINZ
1 patent
US8068279B2
Nov 29, 2011
Optical system of an illumination device of a projection exposure apparatus
SCHUSTER KARL-HEINZ
10 citations
78
ZEISS CARL SMT AG
1 patent
US7545483B2
Jun 9, 2009
Optical element unit for exposure processes
ZEISS CARL SMT AG
0 citations
49
PHOENIX MECANO DIGITAL ELEKTRONIK GMBH
1 patent
US9964268B2
May 8, 2018
LED exterior and street lamps
PHOENIX MECANO DIGITAL ELEKTRONIK GMBH
0 citations
17