Inventor

SCHMEREK DIETER

DE4 patents

⚠️ This page may combine multiple inventors who share the name “SCHMEREK DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US6825914B2Nov 30, 2004

System for flushing at least one internal space of an objective

ZEISS CARL SMT AG14 citations81

US7545483B2Jun 9, 2009

Optical element unit for exposure processes

ZEISS CARL SMT AG0 citations49

SCHUSTER KARL-HEINZ

1 patent

US8068279B2Nov 29, 2011

Optical system of an illumination device of a projection exposure apparatus

SCHUSTER KARL-HEINZ10 citations78

PAZIDIS ALEXANDRA

1 patent

US8435726B2May 7, 2013

Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus

PAZIDIS ALEXANDRA0 citations48