Inventor

ZHU LINGLIN

CN3 patents

⚠️ This page may combine multiple inventors who share the name “ZHU LINGLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHANGHAI INST OPTICS & FINE MECH CAS

2 patents

US11726407B2Aug 15, 2023

Integrated super-resolution laser direct-writing device and direct-writing method

SHANGHAI INST OPTICS & FINE MECH CAS0 citations43

US9400433B2Jul 26, 2016

Lithography illumination system

SHANGHAI INST OPTICS & FINE MECH CAS0 citations32

SHANGHAI INST OPTICS & FINE ME

1 patent

US9297744B2Mar 29, 2016

Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time

SHANGHAI INST OPTICS & FINE ME3 citations65