Inventor

PARKINSON BLAKE

US4 patents

⚠️ This page may combine multiple inventors who share the name “PARKINSON BLAKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9318343B2Apr 19, 2016

Method to improve etch selectivity during silicon nitride spacer etch

TOKYO ELECTRON LTD30 citations92

US9378975B2Jun 28, 2016

Etching method to form spacers having multiple film layers

TOKYO ELECTRON LTD6 citations71

WATLOW ELECTRIC MFG

2 patents

US11515190B2Nov 29, 2022

Thermal diffuser for a semiconductor wafer holder

WATLOW ELECTRIC MFG2 citations71

US12148650B2Nov 19, 2024

Thermal diffuser for a semiconductor wafer holder

WATLOW ELECTRIC MFG0 citations61