Inventor
NGO AUSTIN
US10 patents
Patents
10 patentsUS9881820B2Jan 30, 2018
Front opening ring pod
LAM RES CORP124 citations97
US10124492B2Nov 13, 2018
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP25 citations93
US10062590B2Aug 28, 2018
Front opening ring pod
LAM RES CORP23 citations93
US10062589B2Aug 28, 2018
Front opening ring pod
LAM RES CORP20 citations93
US10062599B2Aug 28, 2018
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP30 citations93
US9779977B2Oct 3, 2017
End effector assembly for clean/dirty substrate handling
LAM RES CORP5 citations80
US10427307B2Oct 1, 2019
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
LAM RES CORP3 citations72
US10304717B2May 28, 2019
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP2 citations72
US10770339B2Sep 8, 2020
Automated replacement of consumable parts using interfacing chambers
LAM RES CORP0 citations51
US10707113B2Jul 7, 2020
End effector assembly for clean/dirty substrate handling
LAM RES CORP0 citations48