Inventor
ESTOQUE MARC
US4 patents
Patents
4 patentsUS9881820B2Jan 30, 2018
Front opening ring pod
LAM RES CORP124 citations97
US10062590B2Aug 28, 2018
Front opening ring pod
LAM RES CORP23 citations93
US10062589B2Aug 28, 2018
Front opening ring pod
LAM RES CORP20 citations93
US10541168B2Jan 21, 2020
Edge ring centering method using ring dynamic alignment data
LAM RES CORP9 citations82