Inventor
MARSH RICKY
US16 patents
⚠️ This page may combine multiple inventors who share the name “MARSH RICKY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
14 patentsUS10264663B1Apr 16, 2019
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP29 citations97
US9059678B2Jun 16, 2015
TCCT match circuit for plasma etch chambers
LAM RES CORP29 citations94
US5933314AAug 3, 1999
Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks
LAM RES CORP98 citations93
US10638593B2Apr 28, 2020
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP10 citations92
US11716805B2Aug 1, 2023
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP4 citations85
US11224116B2Jan 11, 2022
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP4 citations84
US6357308B1Mar 19, 2002
Plasma probe and method for making same
LAM RES CORP14 citations81
US10056231B2Aug 21, 2018
TCCT match circuit for plasma etch chambers
LAM RES CORP2 citations73
US6553853B2Apr 29, 2003
Plasma probe and method for making same
LAM RES CORP5 citations70
US12507338B2Dec 23, 2025
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP0 citations62
US12490370B2Dec 2, 2025
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP0 citations62
US12484139B2Nov 25, 2025
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP0 citations62
US12471202B2Nov 11, 2025
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP0 citations62
US12193138B2Jan 7, 2025
Matchless plasma source for semiconductor wafer fabrication
LAM RES CORP0 citations62