Inventor
OOSAKI MAYUKA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OOSAKI MAYUKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS8003940B2Aug 23, 2011
Tool-to-tool matching control method and its system for scanning electron microscope
HITACHI HIGH TECH CORP9 citations84
US7807980B2Oct 5, 2010
Charged particle beam apparatus and methods for capturing images using the same
HITACHI HIGH TECH CORP11 citations84
US7476857B2Jan 13, 2009
Tool-to-tool matching control method and its system for scanning electron microscope
HITACHI HIGH TECH CORP10 citations84
US7408154B2Aug 5, 2008
Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes
HITACHI HIGH TECH CORP12 citations84
US7408155B2Aug 5, 2008
Measuring method and its apparatus
HITACHI HIGH TECH CORP16 citations84
US7399964B2Jul 15, 2008
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
HITACHI HIGH TECH CORP11 citations84
US7164127B2Jan 16, 2007
Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
HITACHI HIGH TECH CORP16 citations84
US8022356B2Sep 20, 2011
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
HITACHI HIGH TECH CORP0 citations52
US7605364B2Oct 20, 2009
Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope
HITACHI HIGH TECH CORP1 citations52