Inventor

SHISHIDO CHIE

JP82 patents

⚠️ This page may combine multiple inventors who share the name “SHISHIDO CHIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHISHIDO CHIE

HITACHI LTD

Defect inspection method and apparatus

Pattern inspection method and apparatus

Visual inspection method and apparatus therefor

Defect inspection method and apparatus therefor

Scanning electron microscope having magnification switching control

Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof

Method and system for inspecting a pattern

Method of inspecting pattern and apparatus thereof

Defect inspection method and apparatus

Pattern inspection method and apparatus

Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen

Circuit pattern inspection method and apparatus

Method and system for monitoring a semiconductor device manufacturing process

Circuit pattern inspection method and apparatus

Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data

Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data

Defect inspection method and apparatus therefor

Method and its apparatus for inspecting a pattern

Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof

Method of inspecting pattern and apparatus thereof with a differential brightness image detection

Method for producing thin-film substrate

Inspection system for circuit patterns and a method thereof

Method for observing specimen and device therefor

Pattern inspection method and apparatus

Pattern inspection method and apparatus

Defect inspection method and apparatus

Pattern inspection method and apparatus

HITACHI HIGH TECH CORP

Method and apparatus for measuring pattern dimensions

Method and apparatus for measuring dimension using electron microscope

Method of monitoring an exposure process

Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device

Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope

Tool-to-tool matching control method and its system for scanning electron microscope

Charged particle beam apparatus and methods for capturing images using the same

Method for measuring a pattern dimension using a scanning electron microscope

Method and apparatus for monitoring exposure process

Tool-to-tool matching control method and its system for scanning electron microscope

Measuring method and its apparatus

Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopes

Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system

Method of measuring dimensions of pattern

System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process

Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same

Method for determining etching process conditions and controlling etching process

Sample dimension-measuring method and charged particle beam apparatus

Method and apparatus for measuring dimension using electron microscope

MAEDA SHUNJI

Defect inspection method and apparatus

RENESAS TECH CORP

Method and system for inspecting a pattern

SHISHIDO CHIE

Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system

NISHIURA TOMOFUMI

Method and apparatus for inspecting defect of pattern formed on semiconductor device