Inventor
ARIGA TATSUYA
JP19 patents
⚠️ This page may combine multiple inventors who share the name “ARIGA TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU MFG CO LTD
12 patentsUS6879617B2Apr 12, 2005
Two stage laser system
KOMATSU MFG CO LTD21 citations92
US6526086B1Feb 25, 2003
Band narrowing laser
KOMATSU MFG CO LTD47 citations92
US5929980AJul 27, 1999
Distance measuring apparatus and shape measuring apparatus
KOMATSU MFG CO LTD39 citations92
US6785319B1Aug 31, 2004
Ultraviolet laser device
KOMATSU MFG CO LTD24 citations86
US7680158B2Mar 16, 2010
LPP type extreme ultra violet light source apparatus and driver laser for the same
KOMATSU MFG CO LTD8 citations83
US6418155B1Jul 9, 2002
Laser device
KOMATSU MFG CO LTD10 citations73
US5621158AApr 15, 1997
Measurement value judging method
KOMATSU MFG CO LTD11 citations73
US7957449B2Jun 7, 2011
Two-stage laser system for aligners
KOMATSU MFG CO LTD6 citations72
US4745614AMay 17, 1988
Silent discharge type laser device
KOMATSU MFG CO LTD9 citations68
US7649188B2Jan 19, 2010
LPP type extreme ultra violet light source apparatus and driver laser for the same
KOMATSU MFG CO LTD2 citations62
US6560269B1May 6, 2003
Fluorine laser device
KOMATSU MFG CO LTD3 citations62
US7006538B2Feb 28, 2006
Apparatus for locking bending mechanism that bends reflex type wavelength selection element
KOMATSU MFG CO LTD3 citations59
USHIO ELECTRIC INC
2 patentsWAKABAYASHI OSAMU
2 patentsENDO AKIRA
2 patentsUS8476609B2Jul 2, 2013
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device
ENDO AKIRA4 citations62
US8093571B2Jan 10, 2012
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device
ENDO AKIRA2 citations62