Inventor

HAYASHI SHIGENORI

JP82 patents

⚠️ This page may combine multiple inventors who share the name “HAYASHI SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAYASHI SHIGENORI

SEMICONDUCTOR ENERGY LAB

Apparatus for fabricating coating and method of fabricating the coating

Method of fabricating the coating

Hard carbon coating for magnetic recording medium

Method for fabricating with ultrasonic vibration a carbon coating

Apparatus and method for depositing a film

CVD apparatus

Plasma generating device and method of plasma processing

Photo CVD apparatus with a glow discharge system

Apparatus for fabricating coating and method of fabricating the coating

Method for plasma processing and apparatus for plasma processing

Method of depositing films using photo-CVD with chamber plasma cleaning

Magnetic recording medium

Process for fabricating a magnetic recording medium

Magnetic recording medium

Magnetic recording medium

Plasma generating device

Method for depositing a film

Photochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reaction

Image-forming member for electrophotography and manufacturing method for the same

Carbonaceous protective films and method of depositing the same

Plasma-assisted cvd of carbonaceous films by using a bias voltage

Plasma processing method and plasma generating device

Electronic device including a densified region

Plasma processing method for improving a package of a semiconductor device

Apparatus for fabricating coating and method of fabricating the coating

Magnetic recording medium

Magnetic recording medium

Plasma Processing method

Image-forming member for electrophotography and manufacturing method for the same

Cyclotron resonance chemical vapor deposition method of forming a halogen-containing diamond on a substrate

CVD apparatus

Method of forming a film on a substrate

Measuring device utilizing a thermo-electromotive element

Method for forming a multi-layer planarization structure

Plasma processing method and products thereof

Process for treating a substrate with a plasma

Electronic device and its manufacturing method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

Apparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasma

Plasma treatment method and plasma treatment system

Wet-etching method and method for manufacturing semiconductor device

Plasma generator with antennas attached to top electrodes

Method and apparatus for fabrication of dielectric thin film

Method and apparatus of forming thin films

Capacitance sensor

Method of manufacturing a capacitance sensor

Method for fabricating semiconductor device

RICOH KK

Electrophotographic photoconductor with amorphous carbon overlayer

Electrophotographic photoconductor

Electrophotographic photoconductor

PANASONIC CORP

Insulating buffer film and high dielectric constant semiconductor device and method for fabricating the same