Inventor
MOTOMURA Shunichi
JP6 patents
Patents
6 patentsUS12119202B2Oct 15, 2024
Mechanism for adjusting angle of incidence on charged particle beam aperture, and charged particle beam device
HITACHI HIGH TECH CORP2 citations70
US11335532B2May 17, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations69
US11107656B2Aug 31, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations60
US11817289B2Nov 14, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations59
US11798776B2Oct 24, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations59
US11164716B2Nov 2, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations48