Inventor
CHIU JEN-CHUNG
TW5 patents
Patents
5 patentsUS9741537B1Aug 22, 2017
Method and apparatus for supplying ion beam in ion implantation process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US11830700B2Nov 28, 2023
Repellent electrode for electron repelling
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11295926B2Apr 5, 2022
Repellent electrode for electron repelling
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12243707B2Mar 4, 2025
Repellent electrode for electron repelling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10319557B2Jun 11, 2019
Ion generator and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49